PHYSICAL VAPOR DEPOSITION OF ORGANIC LAYERS USING TUBULAR SOURCES FOR MAKING ORGANIC LIGHT-EMITTING DEVICES

PURPOSE: An organic layer evaporation equipment is provided to allow a relatively uniform layer of organic material to be deposited on the structure by relative motion between the source and the structure. CONSTITUTION: Apparatus for vapor-depositing an organic layer onto a structure which provides...

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Bibliographische Detailangaben
Hauptverfasser:	SHORE JOEL D, PIGNATA ANGELO G, VANSLYKE STEVEN A
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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