PHYSICAL VAPOR DEPOSITION OF ORGANIC LAYERS USING TUBULAR SOURCES FOR MAKING ORGANIC LIGHT-EMITTING DEVICES

PURPOSE: An organic layer evaporation equipment is provided to allow a relatively uniform layer of organic material to be deposited on the structure by relative motion between the source and the structure. CONSTITUTION: Apparatus for vapor-depositing an organic layer onto a structure which provides part of an organic light-emitting device comprises a housing defining a chamber and a pump connected to the chamber for producing a reduced pressure therein, the structure being positioned in the chamber in a deposition zone, a tubular thermal physical vapor deposition source(210) disposed in the chamber and spaced from the structure, the source defining a cavity for receiving organic material to be vaporized, and the organic material having a vapor pressure which is substantially greater than the reduced pressure in the chamber, the tubular physical vapor deposition source defining a line of openings(214) extending into the cavity, the line of openings being arranged so that vaporized organic material is deposited into the deposition zone onto the structure, a unit for controllably heating the tubular vapor deposition source to cause the organic material to form a vapor at a controlled rate, the vapor being distributed throughout the cavity and exiting the cavity through the line of openings at a controlled rate, and a unit for providing relative linear motion between the tubular vapor deposition source and the structure so that the vapor of organic material in the deposition zone causes formation of a uniformly thick vapor-deposited organic layer on the structure. 본 발명의 장치는 유기물 발광 장치의 제조에 있어서 유기물 층의 열적 물리적 증착을 위한 관상 소스를 포함하며, 상기 관상 소스는 유기물을 수용하기 위한 공동을 규정하고 있다. 이러한 관상 소스는 제어 가능하게 가열되어, 공동 내부의 유기물을 증발시키고 그리고 공동 내로 연장된 구멍의 열을 통해 공동을 빠져나가는 증기 흐름을 제공한다. 본 장치는 그 위에 유기물 층이 부착되는 OLED 구조체 및 관상 소스를 구비한 감압 챔버를 규정한다. 소스와 구조체 사이의 상대 운동에 의해, 유기물의 비교적 균일한 층이 구조체상에 부착되는 것이 보장된다.