INTEGRATED CIRCUIT BONDING PAD AND MANUFACTURING METHOD THEREOF
PURPOSE: An integrated circuit bonding pad is provided to supply an enough current into the bonding pad by securing a contact surface over a defined size and to prevent a crack in an insulating body due to a physical stress by forming an island-type insulating structure. CONSTITUTION: An integrated...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | PURPOSE: An integrated circuit bonding pad is provided to supply an enough current into the bonding pad by securing a contact surface over a defined size and to prevent a crack in an insulating body due to a physical stress by forming an island-type insulating structure. CONSTITUTION: An integrated circuit bonding pad comprises a first insulating layer(2710), a lower interconnection(2740) formed on the first insulating layer(2710), a second insulating pattern(2745) having via holes formed on the lower interconnection(2740), conductive plugs(2750) filled into the via holes, a second interconnection(2760) formed on the second insulating pattern(2745) and the conductive plugs(2750), a metal bumper layer(2900) formed on the second interconnection(2760), built-in island-type insulating bodies(2905), and an upper bonding pad(2705), thereby restraining a crack due to a physical stress. |
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