APPARATUS AND METHOD FOR SEARCHING STRAY CHILD THROUGH COMMUNICATION NETWORK

APPARATUS AND METHOD FOR SEARCHING STRAY CHILD THROUGH COMMUNICATION NETWORK

The present invention provides a process sequence and related hardware for filling a hole with copper. The sequence comprises first forming a reliable barrier layer in the hole to prevent diffusion of the copper into the dielectric layer through which the hole is formed. One sequence comprises formi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK, JEONG HO, JIN, HYEOK SU, KIM, HYEONG GEUN, HONG, GYEONG PO, NOH, JU YEONG, EOM, MI HYEON
Format: Patent
Sprache:eng
Schlagworte:
ALARM SYSTEMS
CALCULATING
COMPUTING
COUNTING
DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
ORDER TELEGRAPHS
PHYSICS
SIGNALLING
SIGNALLING OR CALLING SYSTEMS
SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR
TRANSMISSION
WIRELESS COMMUNICATIONS NETWORKS
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Beschreibung
Zusammenfassung:The present invention provides a process sequence and related hardware for filling a hole with copper. The sequence comprises first forming a reliable barrier layer in the hole to prevent diffusion of the copper into the dielectric layer through which the hole is formed. One sequence comprises forming a generally conformal barrier layer over a patterned dielectric, etching the bottom of the hole, depositing a second barrier, and then filling the hole with copper. An alternative sequence comprises depositing a first barrier layer over a blanket dielectric layer, forming a hole through both the barrier layer and the dielectric layer, depositing a generally conformal second barrier layer in the hole, removing the barrier layer from the bottom of the hole, and selectively filling the hole with copper.