THIN FILM-TYPE SUPER CAPACITOR AND PREPARATION METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a thin film super capacitor that can be applied to ultra- compact precision parts and the power source of information communication equipment by composing a thin film battery in a hybrid and individually, the manufacturing method of the thin film super capacitor, and...

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Bibliographische Detailangaben
Hauptverfasser:	CHO, WON IL, JUN, EUN JEONG, LIM, JAE HONG, JUNG, HYEONG JIN, NAM, SANG CHEOL, YOON, YEONG SU, CHO, BYEONG WON, YOON, GYEONG SEOK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a thin film super capacitor that can be applied to ultra- compact precision parts and the power source of information communication equipment by composing a thin film battery in a hybrid and individually, the manufacturing method of the thin film super capacitor, and a hybrid battery utilizing the thin film super capacitor. SOLUTION: A lower electrode thin film (23) with a thickness of 4 μm or less is formed on a substrate (20), a solid electrolyte thin film (24) with a thickness of 5 μm or less is formed on the lower electrode thin film (23), and an upper electrode thin film (25) with a thickness of 4 μm or less is formed on the solid electrolyte thin film (24), thus composing the thin film super capacitor. By utilizing the thin film super capacitor, the hybrid battery is composed.