Novel Bismethyl-halo-phenylsulfonyldiazomethanes and their preparation

PURPOSE: Provided are novel bis(methyl-halo-phenylsulfonyl)diazomethane compounds used as a photoacid generator in a preparation of semiconductor devices, which is excellent in transmittance, absorbency, and heat-stability. CONSTITUTION: The bis(methyl-halo-phenylsulfonyl)diazomethane compounds repr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, JAE GEUN, LEE, GONG YEOL, KIM, DONG YEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS CHEMISTRY METALLURGY ORGANIC CHEMISTRY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!