MONITORING OF EFFLUENT FROM CHAMBER AND CHAMBER CLEANING APPARATUS

PURPOSE: A monitoring of effluent from chamber is provided to stop processing after a predetermined period or to determine a process endpoint, such as an endpoint of a chamber cleaning process, and to clean chamber walls and surfaces without erosion of chamber surfaces. CONSTITUTION: An energizing c...

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Bibliographische Detailangaben
Hauptverfasser:	TSAI KENNETH, PHAM QUYEN, BACH TUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: A monitoring of effluent from chamber is provided to stop processing after a predetermined period or to determine a process endpoint, such as an endpoint of a chamber cleaning process, and to clean chamber walls and surfaces without erosion of chamber surfaces. CONSTITUTION: An energizing cell(22) is adapted to receive an effluent. A gas energizer(17) is able to energize the effluent in the cell(22) to emit a radiation. A radiation permeable window(27) is spaced apart from an interior wall 36 of the(22) cell by a distance d that is sufficiently high to reduce a deposition of effluent residue from the energized gas on the window(27), A detector(26) detects the radiation.