OPTICAL PROCESSING DEVICE
PURPOSE: To provide an optical processing device which makes optical processing possible without deteriorating the characteristics of a heat ray absorbing filter which suppresses the temperature increase of the object to be irradiated. CONSTITUTION: The light from a lamp 1 is successively passed thr...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | PURPOSE: To provide an optical processing device which makes optical processing possible without deteriorating the characteristics of a heat ray absorbing filter which suppresses the temperature increase of the object to be irradiated. CONSTITUTION: The light from a lamp 1 is successively passed through a far-UV ray cut filter 3 which removes or attenuates light in > 330 nm wavelength and through a heat ray absorbing filter 4 which removes or attenuates light in >= 750 nm wavelength, in this order to irradiate the object L of irradiation. The heat ray absorbing filter 4 is cooled by the cooling air flowing through an air passage 10 as a closed space. |
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