OPTICAL PROCESSING DEVICE

PURPOSE: To provide an optical processing device which makes optical processing possible without deteriorating the characteristics of a heat ray absorbing filter which suppresses the temperature increase of the object to be irradiated. CONSTITUTION: The light from a lamp 1 is successively passed thr...

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Bibliographische Detailangaben
Hauptverfasser: MOROISHI KOTARO, IIDA TOMOYUKI
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: To provide an optical processing device which makes optical processing possible without deteriorating the characteristics of a heat ray absorbing filter which suppresses the temperature increase of the object to be irradiated. CONSTITUTION: The light from a lamp 1 is successively passed through a far-UV ray cut filter 3 which removes or attenuates light in > 330 nm wavelength and through a heat ray absorbing filter 4 which removes or attenuates light in >= 750 nm wavelength, in this order to irradiate the object L of irradiation. The heat ray absorbing filter 4 is cooled by the cooling air flowing through an air passage 10 as a closed space.