METHOD FOR FABRICATING BACK LIGHT UNIT METALLIC MOLD OF LIQUID CRYSTAL DISPLAY

PURPOSE: A method for fabricating a back light unit metallic mold of a liquid crystal display is provided to mold the back light unit of the LCD with an X-ray lithography technology using a synchrotron radiation of a radiation accelerator and an ELECTRO-forming process. CONSTITUTION: A titanium(2) is deposited on a silicon substrate(1) using a thermal evaporator. After spin-coating a liquid phase PMMA on the silicon substrate, it is annealed at 180 deg.C for one hour. A PMMA plate of 1mm thickness is bonded with the liquid phase PMMA on the silicon substrate and then 1 kg weight is applied for three hours. The 1mm PMMA plate is lapped and polished to have 100 micrometer thickness. And, Cr and Au used as a conductive layer are deposited on the surface of a PMMA(3). And, a photo resist is spin-coated and is annealed on a hot plate. After exposing a UV ray, the photo resist is developed. Then, an X-ray absorb layer is obtained by an ELECTRO-forming. The unnecessary photo resist is removed. An X-ray from the radiation accelerator is exposed to the PMMA. Then, a titanium(10) for nickel plating is deposited on the PMMA pattern, and a nickel metallic mold is obtained by removing the silicon substrate by dissolving the PMMA with an organic solvent.