Dual fritted bubbler

PURPOSE: To provide a system for stably feeding a fluid saturated with an organometallic compound material to a chemical vapor deposition system. CONSTITUTION: This system is composed in such a manner that (i) the upper closed part of a closed cylindrical vessel(30) is provided with a gas introducti...

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Bibliographische Detailangaben
Hauptverfasser: O'GRADY JOHN, RANGARAJAN SRI PRAKASH
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: To provide a system for stably feeding a fluid saturated with an organometallic compound material to a chemical vapor deposition system. CONSTITUTION: This system is composed in such a manner that (i) the upper closed part of a closed cylindrical vessel(30) is provided with a gas introduction opening part(24) and a gas outlet opening part(25), (ii) the inside of the cylindrical vessel(30) is provided with a space(28) which is connected with the gas introduction opening part and is not connected with the gas outlet opening part, (iii) the space between the bottom part(27) of the space(28) and the bottom part of the cylindrical vessel(30) is provided with a gap, the bottom part(27) is installed with a first porous element(32), and the transfer of vapor generated in the space(28) to a space(29) including the gas outlet opening part is made possible, and the space(28) is installed with a fixed organometallic compound and (iv), on the inside of the space(29), the gas outlet opening part is installed with a second porous element(33). By the above composition, the fluid saturated with the above organometallic compound material is fed to the chemical vapor deposition system. 화학 증기상 증착 시스템용 고체 유기금속 원료와 함께 사용하는 이중 챔버형 버블러(bubbler) 용기, 및 이러한 시스템에 운반하기 위한 원료로 포화된 캐리어 가스를 운반하는 방법. 버블러 용기는 캐리어 가스가 그의 상단에 있는 입구를 통해 입구 챔버로 들어가고 이 가스가 유기금속 증기로 포화된 후에 입구 챔버의 플로어에 위치한 제 1의 다공성 프릿을 통해 출구 챔버로 나오며 버블러의 출구에 위치한 제 2의 다공성 프릿 엘리먼트를 통과한 후 버블러에서 제거되도록 설계되어 있다.