WAFER LOADING BOAT OF SEMICONDUCTOR VERTICAL DIFFUSION FURNACE

PURPOSE: A wafer loading boat of a semiconductor vertical diffusion furnace is provided to prevent adjacent wafers from colliding with each other, by preventing the wafers from drooping even if the wafers are unstably loaded in a boat. CONSTITUTION: A plurality of supporting bars(22) are coupled to...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	JUNG, DONG OK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE: A wafer loading boat of a semiconductor vertical diffusion furnace is provided to prevent adjacent wafers from colliding with each other, by preventing the wafers from drooping even if the wafers are unstably loaded in a boat. CONSTITUTION: A plurality of supporting bars(22) are coupled to an edge portion between upper and lower plates, separated by a predetermined interval. An insertion groove(22a) is for formed that a plurality of wafers(30) are inserted and settled in a lengthwise direction of the supporting bars. A plurality auxiliary supporting bars(24) are disposed in parallel between the supporting bars, separated by a predetermined interval. A hanging protrusion(24a) is protruded to support the wafer so that the wafer does not droop in the lengthwise direction of the auxiliary bars.