ULTRASONIC CLEANING DEVICE AND RESIST STRIPPING SYSTEM

PURPOSE: An ultrasonic cleaning device is provided to stably operate an ultrasonic oscillation element without requiring a complicated structure and circulation of a large quantity of cleaning solvent and to easily clean both upper and lower surfaces of an object to be cleaned. CONSTITUTION: An ultr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOSHIOKA HIROTO, MURATANI TOSHIAKI, KOBAYASHI KAZUKI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
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