ULTRASONIC CLEANING DEVICE AND RESIST STRIPPING SYSTEM

PURPOSE: An ultrasonic cleaning device is provided to stably operate an ultrasonic oscillation element without requiring a complicated structure and circulation of a large quantity of cleaning solvent and to easily clean both upper and lower surfaces of an object to be cleaned. CONSTITUTION: An ultr...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	YOSHIOKA HIROTO, MURATANI TOSHIAKI, KOBAYASHI KAZUKI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE: An ultrasonic cleaning device is provided to stably operate an ultrasonic oscillation element without requiring a complicated structure and circulation of a large quantity of cleaning solvent and to easily clean both upper and lower surfaces of an object to be cleaned. CONSTITUTION: An ultrasonic cleaning part has an upper cleaning solvent supplying nozzle(12) and a lower cleaning solvent supplying nozzle(14). The upper cleaning solvent supplying nozzle(12) supplies an upper surface cleaning solvent(13) to the upper surface of a glass substrate(11). The lower cleaning solvent supplying nozzle(14) supplies a lower surface cleaning solvent(15) to the lower surface of the substrate(11) as a shower irradiated with ultrasonic waves. An oscillation element which oscillates the ultrasonic waves irradiating the lower surface cleaning solvent(15) is installed in a circulation passage for the cleaning solvent(15), which passage extends from the upstream side to the downstream side, in the direction between the horizontal direction and the upward direction.