VACUUM GAUGE

PURPOSE: A vacuum gauge is provided to reduce the number of controllers by combining two gauges into a single gauge and to reduce an installation space of the gauge. CONSTITUTION: A vacuum gauge includes a first measuring member(12) for measuring a low vacuum state, a second measuring member(20) for...

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Bibliographische Detailangaben
1. Verfasser:	YOON, YONG JO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE: A vacuum gauge is provided to reduce the number of controllers by combining two gauges into a single gauge and to reduce an installation space of the gauge. CONSTITUTION: A vacuum gauge includes a first measuring member(12) for measuring a low vacuum state, a second measuring member(20) for measuring a high vacuum state, and a base(30) for mounting the first and second measuring members. The first measuring member is a converter gauge, which measures a thermal conductivity between a heated wire and the surroundings of the heated wire and detects pressure. The second measuring member is an ion gauge, which ionizes molecules inside gas, collects the ions, measures the electric current and detects the pressure.