TUBE FOR DEPOSITING CHEMICAL VAPOR

PURPOSE: A tube for depositing chemical vapor is to integrally form a gas injecting pipe and a discharging pipe at a tube to simplify an internal structure and inject and discharge gas corresponding to a position of a wafer loaded in a boat, thereby uniformly forming a film on the wafer. CONSTITUTIO...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AHN, JAE HYEOK, YANG, CHANG JIP, KIM, TAE CHEOL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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