CASSETTE STAGE FOR SEMICONDUCTOR APPARATUS

PURPOSE: A cassette stage for a semiconductor apparatus is to prevent a wafer cassette laid on the cassette stage from sliding by a rotating speed. CONSTITUTION: A wafer cassette(12) is laid on an upper surface of a cassette stage(10), and a wafer(14) to be processed or processed wafer is received in the wafer cassette. The wafer cassette is upwardly transferred by a transferring mechanism to load or unload the wafer onto a semiconductor apparatus. The semiconductor apparatus includes load lock chambers and process chambers. To insert the wafer into the chamber, the cassette stage rotates horizontally to coincide a direction of the cassette stage with a direction of the chamber. The cassette stage is provided on the upper portion with a guide to support a lower end corner of the wafer cassette laid on the cassette stage, thereby preventing the wafer cassette laid on the cassette stage from sliding by a rotating speed.