COLLECTING APPARATUS FOR ANALYZING A COMPOSITION OF PARTICLES IN A SEMICONDUCTOR MANUFACTURING PROCESS

PURPOSE: A collecting apparatus for analyzing a composition of particles in a semiconductor manufacturing process is provided to precisely estimate the cause of a process defect caused by particles and to perform a sampling regardless of distribution, quantity and dimension of the particles, by easily connecting the particles existing in an equipment for manufacturing a semiconductor device, and by performing a qualitative and quantitative analysis. CONSTITUTION: A collecting apparatus for analyzing a composition of particles in a semiconductor manufacturing process comprises an impinger bottle(10), an apparatus for decreasing the temperature of a solvent, an air inducing pipe, an air exhaust pipe(12) and a pump(P). The impinger bottle is capable of containing a predetermined quantity of the solvent. The apparatus for decreasing the temperature of the solvent is established outside the impinger bottle so that coolant contacts the circumference of the impinger bottle for a heat exchange with the solvent. The air-inducing pipe is inserted into the impinger bottle so that air including particles is absorbed into the impinger bottle. The air exhaust pipe is established in a side of the impinger bottle so that purified bubbles reacting with the solvent can be exhausted. The pump is established in a front end of the air exhaust pipe, to maintain the impinger bottle as a vacuum state before external air is absorbed into the impinger bottle.