ALARM APPARATUS FOR SEMICONDUCTOR SUBSTRATE

PURPOSE: An alarm apparatus for a semiconductor substrate is provided to increase an operating efficiency of a wafer measuring apparatus, by informing an operation of a wafer lot completion message that a wafer lot measurement is finished. CONSTITUTION: An alarm apparatus comprises a wafer measureme...

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Bibliographische Detailangaben
1. Verfasser:	LEE, GWANG SEONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: An alarm apparatus for a semiconductor substrate is provided to increase an operating efficiency of a wafer measuring apparatus, by informing an operation of a wafer lot completion message that a wafer lot measurement is finished. CONSTITUTION: An alarm apparatus comprises a wafer measurement block(10), a signal processing unit(20) and an alarming unit(30). The wafer measurement block measures a wafer mark to measure the quantity of misalignment, and generates a measurement completion signal when the measurement is finished. The signal processing unit receives the measurement completion signal from the wafer measurement block, and generates a lamp/alarm generating signal. The alarming unit receives the lamp/alarm generating signal from the signal processing unit, and operates a lamp and a speaker.