AUTO LEVELLING DEVICE OF STEPPER

PURPOSE: An auto leveling device of a stepper is provided to achieve the high precision of the leveling by adjusting the size of the leveling beam. CONSTITUTION: A leveling device of a stepper comprises a beam source(21) for generating a leveling beam. A parallel lens(22) is installed at a front por...

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Bibliographische Detailangaben
Hauptverfasser:	LEE, DONG YUN, LEE, GWANG SEONG
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: An auto leveling device of a stepper is provided to achieve the high precision of the leveling by adjusting the size of the leveling beam. CONSTITUTION: A leveling device of a stepper comprises a beam source(21) for generating a leveling beam. A parallel lens(22) is installed at a front portion of the beam source(21) so as to allow the leveling beam incident into a wafer(27) to be parallel. An iris(23) for adjusting the size of the leveling beam is installed at a front side of the parallel lens(22). A reflected leveling beam is focused by a focusing lens(24). The focusing lens(24) is installed in an optical axis of the leveling beam which is reflected from the wafer(27). A position detecting device(25) is installed at a rear side of the focusing lens(24) so as to detect the position of a beam spot. A leveling stage(26) is installed on a wafer stage and is driven according to the beam spot signal.