SEMICONDUCTOR CHIP HAVING TRENCH FOR PREVENTING CRACKS
PURPOSE: A semiconductor chip is provided which is to prevent the generated cracks from intruding into the semiconductor chip by forming a trench on the scribe line and in the semiconductor chip. CONSTITUTION: A semiconductor chip is provided wherein many trenches(13) are formed on the scribe line(1...
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Zusammenfassung: | PURPOSE: A semiconductor chip is provided which is to prevent the generated cracks from intruding into the semiconductor chip by forming a trench on the scribe line and in the semiconductor chip. CONSTITUTION: A semiconductor chip is provided wherein many trenches(13) are formed on the scribe line(11), in the semiconductor chip(10), and into the space, except for the portion where the device had been formed, while the shapes of the transaction of the trench(13) are a circle, an ellipse, a triangle, a square, a rectangle, a pentagon, a hexagon, a lozenge, star or iron dumb-bells, and the shapes of vertical section thereof are U-type, V-type or water jar-type. |
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