FABRICATION METHOD OF SEMICONDUCTOR MEMORY DEVICE

PURPOSE: A method for fabricating a semiconductor memory device is provided to improve characteristic of the device. CONSTITUTION: After isolation layers for defining active regions are formed in a semiconductor substrate, a plug oxide layer is formed on a semiconductor substrate and partly removed....

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	IM, SEONG HYEOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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