TARGET PART CAPABLE OF SAVING TARGET MATERIAL

PURPOSE: A target part capable of saving a target material is to inform a consumed amount of the target material to an operator and thus save the target material when a display panel displaying the consumed amount of the target material is abnormal. CONSTITUTION: A target part comprises a scale mark...

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Bibliographische Detailangaben
Hauptverfasser:	BAE, DONG GWAN, LEE, JU SIK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE: A target part capable of saving a target material is to inform a consumed amount of the target material to an operator and thus save the target material when a display panel displaying the consumed amount of the target material is abnormal. CONSTITUTION: A target part comprises a scale mark(120) to discriminate a consumed amount of the target material(110) by an operator's eye. The target part is mounted on a back plate(100) of a reactor chamber such as a sputtering apparatus. The scale mark is formed at a side wall surface of the target material. Aluminum is used for the target material. The target has a cylindrical structure. The scale mark is formed along the circumference of the cylindrical target. The scale mark is displayed with a material having a different color from the color of the target material. 스퍼터링 장치에서 타겟 소모량 표시 계기판이 고장나더라도 타겟의 낭비가 발생하는 것을 억제할 수 있는 스퍼터링 장치의 타겟부에 관해 개시한다. 이를 위해 본 발명은, 스퍼터링 장치의 타겟을 장착하기 위한 플레이트(plate)와, 상기 플레이트에 장착되어 반도체 기판에 적층되는 타겟(target)을 구비하는 스퍼터링 장치의 타겟부에 있어서, 상기 타겟은 소모된 정도를 육안으로 식별 가능하도록 눈금선이 표기된 것을 특징으로 하는 스퍼터링 장치의 타겟부를 제공한다.