THIN FILM TRANSISTOR USING A METHOD OF CRYSTALLIZING A SILICON THIN FILM AND A METHOD THEREOF
PURPOSE: A method of manufacturing a thin film transistor is provided to improve a characteristic of a device by using a silicon thin film transistor having an outstanding dimension of a silicon grain as an active layer of the thin film transistor. CONSTITUTION: A method of manufacturing a thin film...
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Format: | Patent |
Sprache: | eng ; kor |
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