WAFER TRANSFER APPARATUS

PURPOSE: A wafer transfer apparatus is provided to prevent an external air(11) from being in flowed into the body of the wafer transfer apparatus by blocking a penetration hole of the body. CONSTITUTION: A wafer transfer apparatus(7) prevents the contamination of a wafer(9) by improving the structur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOOK, JUNG HO, JUN, CHUN BYUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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