ELECTRIC CHARGE STORING ELECTRODE FORMING METHOD OF SEMICONDUCTOR MEMORY DEVICE

PURPOSE: An electric charge storing electrode forming method is provided to have the sufficient electric charge storing value while maintaining the existing process as it is. CONSTITUTION: The electric charge storing electrode forming method of a semiconductor memory device comprises the steps of: f...

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Bibliographische Detailangaben

Hauptverfasser:	KIM, YUNG SU, JUNG, EUI SAM
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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