A semiconductor device evaluation device and a semiconductor device test board manufacturing method
An evaluation device of a semiconductor element is provided. In the evaluation device of a semiconductor element, which includes a housing having an internal space and a coupling member, highly reliable evaluation results can be obtained through a housing which seals the internal space where the sem...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | An evaluation device of a semiconductor element is provided. In the evaluation device of a semiconductor element, which includes a housing having an internal space and a coupling member, highly reliable evaluation results can be obtained through a housing which seals the internal space where the semiconductor element under test is tested and maintains the space in a vacuum state.
반도체 소자의 평가 장치가 제공된다. 내부 공간 및 결합 부재를 갖는 하우징을 포함하는 상기 반도체 소자의 평가 장치에 있어서, 피시험 반도체 소자가 테스트되는 내부 공간을 밀폐하여 진공 상태로 유지시키는 하우징을 통해, 신뢰성 높은 평가 결과를 얻을 수 있다. |
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