HYDROGEN DETECTION SENSOR
The present invention provides a hydrogen detection sensor, comprising: a conductive substrate; an electrode layer disposed spaced apart from each other on a conductive substrate; a sensing layer disposed between the electrode layers and having a resistance value changed according to hydrogen sensin...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | The present invention provides a hydrogen detection sensor, comprising: a conductive substrate; an electrode layer disposed spaced apart from each other on a conductive substrate; a sensing layer disposed between the electrode layers and having a resistance value changed according to hydrogen sensing; and a metal layer disposed between the conductive substrate and the electrode layer and having a lower Fermi level than that of the conductive substrate. Therefore, the present invention can provide the hydrogen detection sensor capable of obtaining a stable hydrogen detection signal while maintaining low concentration hydrogen detection capability.
본 발명은, 전도성 기판과, 전도성 기판 상에 서로 이격되어 배치되는 전극층과, 전극층 사이에 배치되며 수소 감지에 따라 저항값이 변하는 감지층과, 전도성 기판 및 전극층 사이에 배치되며, 전도성 기판 보다 페르미 준위가 낮은 금속층을 포함하는 수소 감지 센서를 제공한다. |
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