Gas line inspection device for semiconductor manufacturing equipment

The present invention relates to a gas supply line inspection device for semiconductor manufacturing equipment which inspects accuracy of a gas supply line by fixing an inspection jig onto a fixed base and placing a fixed rib of the gas supply line on a reference rib of a flange, thereby preventing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	CHO SUNG CHEOL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The present invention relates to a gas supply line inspection device for semiconductor manufacturing equipment which inspects accuracy of a gas supply line by fixing an inspection jig onto a fixed base and placing a fixed rib of the gas supply line on a reference rib of a flange, thereby preventing risk of gas leakage when fixed to a gas input line of the semiconductor manufacturing equipment. 본 발명은 고정베이스 상에 검수 지그를 고정하여 가스 공급라인의 고정리브를 플랜지의 기준리브에 위치시켜 가스 공급라인의 정확도를 검사하므로 반도체 제조장비의 가스 유입라인에 고정시 가스 누출의 위험을 미연에 방지할 수 있는 반도체 제조 장비용 가스 공급라인 검사장치에 관한 것이다.