LASER LIFT-OFF DEVICE FOR MICRO LED

The present invention relates to a laser lift-off apparatus for manufacturing a micro LED. The provided laser lift-off apparatus for the micro LED comprises: a laser source for outputting a laser; at least one reflection mirror for reflecting a laser output from the laser source in the direction of...

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Bibliographische Detailangaben
Hauptverfasser:	JEONG HAE SEOK, BAEK JU YEOUL, LEE CHEOL HYEONG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The present invention relates to a laser lift-off apparatus for manufacturing a micro LED. The provided laser lift-off apparatus for the micro LED comprises: a laser source for outputting a laser; at least one reflection mirror for reflecting a laser output from the laser source in the direction of a micro LED material being manufactured; a micro-optical lens unit for converting the laser reflected by the reflection mirror into a linear laser; a stage on which the micro LED material being manufactured is placed on an upper side and the linear laser converted from the micro-optical lens unit is incident; and a control unit for controlling the laser source, the reflection mirror, the micro-optical lens unit or the stage. An objective of the present invention is to provide the laser lift-off apparatus for the micro LED which can quickly implement laser lift-off. 본 발명은, 마이크로 엘이디 제조용 레이저 리프트 오프 장치에 있어서, 레이저를 출력하는 레이저소스; 상기 레이저소스에서 출력된 레이저를 제조 중인 마이크로 엘이디 소재 방향으로 반사시키는 적어도 한 개 이상의 반사미러; 상기 반사미러에서 반사된 레이저를 선형의 레이저로 변환시키는 마이크로광학렌즈부; 상측에 제조 중인 마이크로 엘이디 소재가 안치되고 상기 마이크로광학렌즈부에서 변환된 선형 레이저가 입사되는 스테이지; 및 상기 레이저소스, 반사미러, 마이크로광학렌즈부 또는 스테이지를 제어하는 제어부;를 포함하는 마이크로 엘이디용 레이저 리프트 오프 장치를 제공한다.