SUBLIMATION PURIFYING APPARATUS AND TRAP UNIT THEREOF

According to an embodiment of the present invention, provided is a sublimation purifying apparatus comprising: a main body unit in which a first internal space is formed in a longitudinal direction wherein a vaporization member for receiving an object to be purified and a sublimation member, to which a gaseous object to be purified is attached, are disposed in the first internal space; a heater unit located on an outer circumferential surface of the main body unit, and including a first heating member for heating the vaporization member and a second heating member for heating the sublimation member; a vacuum pump unit connected to the main body unit and controlling a vacuum state of the first internal space; and a trap unit provided between the main body unit and the vacuum pump unit, and including a frame member having a second internal space in communication with the first internal space and a plurality of perforated plates detachably coupled to an inner circumferential surface of the frame member. In one of the perforated plates, a position of a hollow part does not overlap that of an adjacent perforated plate. According to the present invention, the movement of a material is physically blocked to prevent a sublimated material from being introduced into the vacuum pump. 본 발명의 일 실시예는 길이방향을 따라 제1내부공간이 형성되며, 제1내부공간에 정제 대상물이 수용되는 기화부재 및 기체 상태의 정제 대상물이 부착되는 승화부재가 배치되는 본체부와, 본체부의 외주면에 위치하며, 기화부재를 가열하는 제1가열부재 및 승화부재를 가열하는 제2가열부재를 포함하는 히터부와, 본체부와 연결되어, 제1내부공간의 진공 상태를 조절하는 진공펌프부와, 본체부와 진공펌프부 사이에 구비되며, 제1내부공간과 연통하는 제2내부공간이 형성되는 프레임부재 및 프레임부재의 내주면에 분리 가능하게 결합되는 복수의 타공판을 포함하는 트랩유닛부를 포함하고, 어느 하나의 타공판은, 인접한 타공판과 중공의 위치가 중첩되지 않는 승화 정제 장치를 제공한다.