A Chuck Table And The Manufacturing Method Thereof
The present invention relates to a chuck table (100) capable of preventing the occurrence of control difficulties or control position errors due to the weight of a housing and preventing the occurrence of a step due to a difference in expansion coefficient between a holding member and the housing, a...
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| creator | WON CHAN HEE SHIN JUNG YONG KIM JONG MIN |
| description | The present invention relates to a chuck table (100) capable of preventing the occurrence of control difficulties or control position errors due to the weight of a housing and preventing the occurrence of a step due to a difference in expansion coefficient between a holding member and the housing, and a manufacturing method thereof. According to the present invention, the chuck table (100) comprises: a plate-shaped housing (110) having one side on which a concave receiving groove (111) is formed and having a suction hole (113) formed therein wherein the suction hole communicates with a bottom surface of the receiving groove (111) is formed; and a plate-shaped holding member (120) made of a porous ceramic material and inserted into the receiving groove (111) of the housing (110) wherein the housing (110) is made of a carbon material.
본 발명은 일측에 오목한 수용홈(111)이 형성되고 상기 수용홈(111)의 바닥면으로 연통된 흡입공(113)이 형성된 판상의 하우징(110)과, 상기 하우징(110)의 수용홈(111)에 삽입되어 수용되며 다공성 세라믹 재질로 이루어진 판상의 유지부재(120)를 포함하며; 상기 하우징(110)은 탄소 재질로 형성된 척 테이블(100) 및 그 제조 방법에 관한 것이다. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR102143180BB1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR102143180BB1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR102143180BB13</originalsourceid><addsrcrecordid>eNrjZDByVHDOKE3OVghJTMpJVXDMS1EIyUhV8E3MK01LTC4pLcrMS1fwTS3JyAdLFKXmp_EwsKYl5hSn8kJpbgZlN9cQZw_d1IL8-NTigsTk1LzUknjvIEMDI0MTY0MLAycnQ2PiVAEA0PArsg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>A Chuck Table And The Manufacturing Method Thereof</title><source>esp@cenet</source><creator>WON CHAN HEE ; SHIN JUNG YONG ; KIM JONG MIN</creator><creatorcontrib>WON CHAN HEE ; SHIN JUNG YONG ; KIM JONG MIN</creatorcontrib><description>The present invention relates to a chuck table (100) capable of preventing the occurrence of control difficulties or control position errors due to the weight of a housing and preventing the occurrence of a step due to a difference in expansion coefficient between a holding member and the housing, and a manufacturing method thereof. According to the present invention, the chuck table (100) comprises: a plate-shaped housing (110) having one side on which a concave receiving groove (111) is formed and having a suction hole (113) formed therein wherein the suction hole communicates with a bottom surface of the receiving groove (111) is formed; and a plate-shaped holding member (120) made of a porous ceramic material and inserted into the receiving groove (111) of the housing (110) wherein the housing (110) is made of a carbon material.
본 발명은 일측에 오목한 수용홈(111)이 형성되고 상기 수용홈(111)의 바닥면으로 연통된 흡입공(113)이 형성된 판상의 하우징(110)과, 상기 하우징(110)의 수용홈(111)에 삽입되어 수용되며 다공성 세라믹 재질로 이루어진 판상의 유지부재(120)를 포함하며; 상기 하우징(110)은 탄소 재질로 형성된 척 테이블(100) 및 그 제조 방법에 관한 것이다.</description><language>eng ; kor</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200812&DB=EPODOC&CC=KR&NR=102143180B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200812&DB=EPODOC&CC=KR&NR=102143180B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WON CHAN HEE</creatorcontrib><creatorcontrib>SHIN JUNG YONG</creatorcontrib><creatorcontrib>KIM JONG MIN</creatorcontrib><title>A Chuck Table And The Manufacturing Method Thereof</title><description>The present invention relates to a chuck table (100) capable of preventing the occurrence of control difficulties or control position errors due to the weight of a housing and preventing the occurrence of a step due to a difference in expansion coefficient between a holding member and the housing, and a manufacturing method thereof. According to the present invention, the chuck table (100) comprises: a plate-shaped housing (110) having one side on which a concave receiving groove (111) is formed and having a suction hole (113) formed therein wherein the suction hole communicates with a bottom surface of the receiving groove (111) is formed; and a plate-shaped holding member (120) made of a porous ceramic material and inserted into the receiving groove (111) of the housing (110) wherein the housing (110) is made of a carbon material.
본 발명은 일측에 오목한 수용홈(111)이 형성되고 상기 수용홈(111)의 바닥면으로 연통된 흡입공(113)이 형성된 판상의 하우징(110)과, 상기 하우징(110)의 수용홈(111)에 삽입되어 수용되며 다공성 세라믹 재질로 이루어진 판상의 유지부재(120)를 포함하며; 상기 하우징(110)은 탄소 재질로 형성된 척 테이블(100) 및 그 제조 방법에 관한 것이다.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDByVHDOKE3OVghJTMpJVXDMS1EIyUhV8E3MK01LTC4pLcrMS1fwTS3JyAdLFKXmp_EwsKYl5hSn8kJpbgZlN9cQZw_d1IL8-NTigsTk1LzUknjvIEMDI0MTY0MLAycnQ2PiVAEA0PArsg</recordid><startdate>20200812</startdate><enddate>20200812</enddate><creator>WON CHAN HEE</creator><creator>SHIN JUNG YONG</creator><creator>KIM JONG MIN</creator><scope>EVB</scope></search><sort><creationdate>20200812</creationdate><title>A Chuck Table And The Manufacturing Method Thereof</title><author>WON CHAN HEE ; SHIN JUNG YONG ; KIM JONG MIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR102143180BB13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>WON CHAN HEE</creatorcontrib><creatorcontrib>SHIN JUNG YONG</creatorcontrib><creatorcontrib>KIM JONG MIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WON CHAN HEE</au><au>SHIN JUNG YONG</au><au>KIM JONG MIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A Chuck Table And The Manufacturing Method Thereof</title><date>2020-08-12</date><risdate>2020</risdate><abstract>The present invention relates to a chuck table (100) capable of preventing the occurrence of control difficulties or control position errors due to the weight of a housing and preventing the occurrence of a step due to a difference in expansion coefficient between a holding member and the housing, and a manufacturing method thereof. According to the present invention, the chuck table (100) comprises: a plate-shaped housing (110) having one side on which a concave receiving groove (111) is formed and having a suction hole (113) formed therein wherein the suction hole communicates with a bottom surface of the receiving groove (111) is formed; and a plate-shaped holding member (120) made of a porous ceramic material and inserted into the receiving groove (111) of the housing (110) wherein the housing (110) is made of a carbon material.
본 발명은 일측에 오목한 수용홈(111)이 형성되고 상기 수용홈(111)의 바닥면으로 연통된 흡입공(113)이 형성된 판상의 하우징(110)과, 상기 하우징(110)의 수용홈(111)에 삽입되어 수용되며 다공성 세라믹 재질로 이루어진 판상의 유지부재(120)를 포함하며; 상기 하우징(110)은 탄소 재질로 형성된 척 테이블(100) 및 그 제조 방법에 관한 것이다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | A Chuck Table And The Manufacturing Method Thereof |
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