A Chuck Table And The Manufacturing Method Thereof

The present invention relates to a chuck table (100) capable of preventing the occurrence of control difficulties or control position errors due to the weight of a housing and preventing the occurrence of a step due to a difference in expansion coefficient between a holding member and the housing, and a manufacturing method thereof. According to the present invention, the chuck table (100) comprises: a plate-shaped housing (110) having one side on which a concave receiving groove (111) is formed and having a suction hole (113) formed therein wherein the suction hole communicates with a bottom surface of the receiving groove (111) is formed; and a plate-shaped holding member (120) made of a porous ceramic material and inserted into the receiving groove (111) of the housing (110) wherein the housing (110) is made of a carbon material. 본 발명은 일측에 오목한 수용홈(111)이 형성되고 상기 수용홈(111)의 바닥면으로 연통된 흡입공(113)이 형성된 판상의 하우징(110)과, 상기 하우징(110)의 수용홈(111)에 삽입되어 수용되며 다공성 세라믹 재질로 이루어진 판상의 유지부재(120)를 포함하며; 상기 하우징(110)은 탄소 재질로 형성된 척 테이블(100) 및 그 제조 방법에 관한 것이다.