PARTICLE MEASURING DEVICE FOR WAFER CARRIER
The present invention relates to a particle measuring device (200) for measuring particles of a wafer carrier (100) and a particle measuring method. The particle measuring device (200) comprises a device body (210), a first sampling module (410), a second sampling module (420), a load port (220), a...
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| creator | JEON KWANG SU NOH TAE YONG YOO SEOUNG KYO KIM JUNG DO CHOI WANG MIN LEE HYUN WOOK BANG JU YEON |
| description | The present invention relates to a particle measuring device (200) for measuring particles of a wafer carrier (100) and a particle measuring method. The particle measuring device (200) comprises a device body (210), a first sampling module (410), a second sampling module (420), a load port (220), a load port door (230), and a load port opener (240). When the wafer carrier (100) is mounted on a mounting unit (221) of the load port (220), the particle measuring device (200) is configured to be transported to the first sampling module (410), thereby performing accurate particle measurement in a cleaner environment.
본 발명은 웨이퍼캐리어(100)의 파티클을 측정하기 위한 파티클 측정 장치(200)에 있어서, 장치 본체(210), 제1샘플링모듈(410) 및 제2샘플링모듈(420), 로드포트(220), 로드포트 도어(230), 로드포트 오프너(240)를 포함하되, 상기 로드포트(220)의 안착부(221) 상에 웨이퍼캐리어(100)가 장착되면 상기 제1샘플링모듈(410)까지 반송하도록 구성되어, 보다 청정한 환경에서 정확한 파티클 측정이 이루어질 수 있는 파티클 측정 장치 및 파티클 측정 방법에 관한 것이다. |
| format | Patent |
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본 발명은 웨이퍼캐리어(100)의 파티클을 측정하기 위한 파티클 측정 장치(200)에 있어서, 장치 본체(210), 제1샘플링모듈(410) 및 제2샘플링모듈(420), 로드포트(220), 로드포트 도어(230), 로드포트 오프너(240)를 포함하되, 상기 로드포트(220)의 안착부(221) 상에 웨이퍼캐리어(100)가 장착되면 상기 제1샘플링모듈(410)까지 반송하도록 구성되어, 보다 청정한 환경에서 정확한 파티클 측정이 이루어질 수 있는 파티클 측정 장치 및 파티클 측정 방법에 관한 것이다.</description><language>eng ; kor</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200803&DB=EPODOC&CC=KR&NR=102140063B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200803&DB=EPODOC&CC=KR&NR=102140063B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JEON KWANG SU</creatorcontrib><creatorcontrib>NOH TAE YONG</creatorcontrib><creatorcontrib>YOO SEOUNG KYO</creatorcontrib><creatorcontrib>KIM JUNG DO</creatorcontrib><creatorcontrib>CHOI WANG MIN</creatorcontrib><creatorcontrib>LEE HYUN WOOK</creatorcontrib><creatorcontrib>BANG JU YEON</creatorcontrib><title>PARTICLE MEASURING DEVICE FOR WAFER CARRIER</title><description>The present invention relates to a particle measuring device (200) for measuring particles of a wafer carrier (100) and a particle measuring method. The particle measuring device (200) comprises a device body (210), a first sampling module (410), a second sampling module (420), a load port (220), a load port door (230), and a load port opener (240). When the wafer carrier (100) is mounted on a mounting unit (221) of the load port (220), the particle measuring device (200) is configured to be transported to the first sampling module (410), thereby performing accurate particle measurement in a cleaner environment.
본 발명은 웨이퍼캐리어(100)의 파티클을 측정하기 위한 파티클 측정 장치(200)에 있어서, 장치 본체(210), 제1샘플링모듈(410) 및 제2샘플링모듈(420), 로드포트(220), 로드포트 도어(230), 로드포트 오프너(240)를 포함하되, 상기 로드포트(220)의 안착부(221) 상에 웨이퍼캐리어(100)가 장착되면 상기 제1샘플링모듈(410)까지 반송하도록 구성되어, 보다 청정한 환경에서 정확한 파티클 측정이 이루어질 수 있는 파티클 측정 장치 및 파티클 측정 방법에 관한 것이다.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNAOcAwK8XT2cVXwdXUMDg3y9HNXcHEN83R2VXDzD1IId3RzDVJwdgwK8nQN4mFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8d5BhgZGhiYGBmbGTk6GxsSpAgD5fCWr</recordid><startdate>20200803</startdate><enddate>20200803</enddate><creator>JEON KWANG SU</creator><creator>NOH TAE YONG</creator><creator>YOO SEOUNG KYO</creator><creator>KIM JUNG DO</creator><creator>CHOI WANG MIN</creator><creator>LEE HYUN WOOK</creator><creator>BANG JU YEON</creator><scope>EVB</scope></search><sort><creationdate>20200803</creationdate><title>PARTICLE MEASURING DEVICE FOR WAFER CARRIER</title><author>JEON KWANG SU ; NOH TAE YONG ; YOO SEOUNG KYO ; KIM JUNG DO ; CHOI WANG MIN ; LEE HYUN WOOK ; BANG JU YEON</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR102140063BB13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>JEON KWANG SU</creatorcontrib><creatorcontrib>NOH TAE YONG</creatorcontrib><creatorcontrib>YOO SEOUNG KYO</creatorcontrib><creatorcontrib>KIM JUNG DO</creatorcontrib><creatorcontrib>CHOI WANG MIN</creatorcontrib><creatorcontrib>LEE HYUN WOOK</creatorcontrib><creatorcontrib>BANG JU YEON</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JEON KWANG SU</au><au>NOH TAE YONG</au><au>YOO SEOUNG KYO</au><au>KIM JUNG DO</au><au>CHOI WANG MIN</au><au>LEE HYUN WOOK</au><au>BANG JU YEON</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PARTICLE MEASURING DEVICE FOR WAFER CARRIER</title><date>2020-08-03</date><risdate>2020</risdate><abstract>The present invention relates to a particle measuring device (200) for measuring particles of a wafer carrier (100) and a particle measuring method. The particle measuring device (200) comprises a device body (210), a first sampling module (410), a second sampling module (420), a load port (220), a load port door (230), and a load port opener (240). When the wafer carrier (100) is mounted on a mounting unit (221) of the load port (220), the particle measuring device (200) is configured to be transported to the first sampling module (410), thereby performing accurate particle measurement in a cleaner environment.
본 발명은 웨이퍼캐리어(100)의 파티클을 측정하기 위한 파티클 측정 장치(200)에 있어서, 장치 본체(210), 제1샘플링모듈(410) 및 제2샘플링모듈(420), 로드포트(220), 로드포트 도어(230), 로드포트 오프너(240)를 포함하되, 상기 로드포트(220)의 안착부(221) 상에 웨이퍼캐리어(100)가 장착되면 상기 제1샘플링모듈(410)까지 반송하도록 구성되어, 보다 청정한 환경에서 정확한 파티클 측정이 이루어질 수 있는 파티클 측정 장치 및 파티클 측정 방법에 관한 것이다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | PARTICLE MEASURING DEVICE FOR WAFER CARRIER |
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