Apparatus for transferring substrates
The present invention provides a substrate transfer apparatus. Accordingly, the substrate transfer apparatus is easy for transfer of a substrate and transfer of an overall following process and can more statically and stably perform overall loading, transferring and processing of the overall apparat...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | The present invention provides a substrate transfer apparatus. Accordingly, the substrate transfer apparatus is easy for transfer of a substrate and transfer of an overall following process and can more statically and stably perform overall loading, transferring and processing of the overall apparatus. The substrate transfer apparatus includes a main body unit, a first substrate staying unit, a first pick-up module, a second substrate staying unit and a second pick-up module.
본 발명은, 기판 이송 장치를 제공한다. 따라서, 기판 이송과 후공정 전반의 이송이 용이하고 적재, 이송 및 가공 전반에 있어 장치 전반의 보다 정적이고 안정된 수행이 가능해지는 기판 이송 장치를 제공할 수 있는 효과가 있다. |
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