SUCTION ATTACHED AND BUFFER SHEET FOR VACUUM CHUCK

An objective of the present invention is to provide a suction attached buffer sheet for a vacuum chuck with improved performance. The present invention according to the objective provides the suction attached buffer sheet for a vacuum chuck with improved performance by laminating a porous foamed pol...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIN KWANG YONG, LIM, JEONG SOON, OH JAE BUEM, HWANG YONG OON
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:An objective of the present invention is to provide a suction attached buffer sheet for a vacuum chuck with improved performance. The present invention according to the objective provides the suction attached buffer sheet for a vacuum chuck with improved performance by laminating a porous foamed polymer sheet on an ultrahigh molecular weight polyethylene sheet. By arranging a hot-melt nonwoven fabric between the ultrahigh molecular weight polyethylene sheet and porous foamed polymer sheet for lamination with heat, the suction attached buffer sheet for the vacuum chuck in which porous polypolymers are arranged on an ultra-high molecular weight polyethylene sheet. 본 발명의 목적은 성능을 개선한 진공 척용 흡착 고정 완충 시이트를 제공하고자 하는 것이다. 상기 목적에 따라 본 발명은, 초고분자량 폴리에틸렌 시이트에 다공성 발포 고분자 시이트를 적층하여 성능을 향상시킨 진공 척용 흡착 고정 완충 시이트를 제공한다. 즉, 초고분자량 폴리에틸렌 시이트와 다공성 발포 고분자 시이트 사이에 핫멜트 부직포를 배열하여 열 합지시켜 초고분자량 폴리에틸렌 시이트에 다공성 폴리 고분자이 배열된 진공 척용 흡착 고정 완충 시이트를 제공한다.