APPARATUS FOR INSPECTING WAFER MAPPING

The present invention relates to a wafer mapping inspection apparatus inspecting the loading state of a plurality of wafers loaded in a wafer storage container. The present invention includes a lifting and lowering unit including a stator formed along a wafer loading direction and a mover lifted and...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AHN SANG WOOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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