Wafer Processing Apparatus Having Particle Sensor

According to the present invention, provided is a wafer processing apparatus having a particle detecting sensor, which comprises: a wafer transfer unit holding a wafer and transferring the same within a processing area that a wafer processing process is performed; and a particle detecting sensor dis...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HONG SOON SUK, KIM, DONG JU, HWANG, MYUNG HWAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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