PVD PVD Method and app1r1tus for PVD coating

According to an embodiment, the present invention provides a PVD coating method and a coating apparatus and, more specifically, provides a PVD coating method and a coating apparatus, which can uniformly perform coating even though a size of a coating machine is large, and can continuously metallize...

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Bibliographische Detailangaben
1. Verfasser:	SIM, SEONG YUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	According to an embodiment, the present invention provides a PVD coating method and a coating apparatus and, more specifically, provides a PVD coating method and a coating apparatus, which can uniformly perform coating even though a size of a coating machine is large, and can continuously metallize a coating layer of different materials. 일 실시예에 의하여, 본 발명에서는 PVD 코팅 방법 및 코팅 장치를 제공하며, 특히, 코팅기의 규모가 커도 균일하게 코팅을 할 수 있고, 서로 상이한 소재의 코팅층을 연속으로 증착시킬 수 있는 PVD 코팅 방법 및 코팅 장치를 제공함에 특징이 있다.