Ne APPARATUS FOR MANUFACTURING HIGH PURITY NEON

Provided is a high-purity neon production apparatus. More specifically, provided is a high-purity neon production apparatus which comprises: a compression part compressively supplying crude neon gas within a predetermined pressure range; a catalyst part removing hydrogen (H_2) contained in the crude...

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Bibliographische Detailangaben
Hauptverfasser: LEE, JUN YOUNG, CHOI, HYEUNG CHUL, KIM, HYUN SUB, MOON, HUNG MAN
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:Provided is a high-purity neon production apparatus. More specifically, provided is a high-purity neon production apparatus which comprises: a compression part compressively supplying crude neon gas within a predetermined pressure range; a catalyst part removing hydrogen (H_2) contained in the crude neon gas transferred from the compression part through a reaction with oxygen (O_2); and a low temperature part removing nitrogen (N_2) contained in the crude neon gas transferred from the catalyst part through adsorption. Particularly, nitrogen is removed in the low temperature part through an adsorption process alone or through an adsorption process and a cooling process. 본 발명은, 크루드 네온가스를 소정압력 범위로 압축 공급하는 압축부; 상기 압축부로부터 이송된 크루드 네온가스에 포함된 수소(H)를 산소(O)와의 반응에 의해 제거하기 위한 촉매부; 상기 촉매부로부터 이송된 크루드 네온가스에 포함된 질소(N)를 흡착을 통해 제거하기 위한 저온부; 를 포함하는 고순도 네온 생산 장치를 제공한다. 특히, 상기 저온부에서는 흡착 공정 단독 또는 흡착 및 냉각 공정을 통해 질소를 제거하는 고순도 네온 생산 장치를 제공한다.