System and Method for Testing of Probe Card
According to an embodiment of the present invention, a probe card test system includes a probe card with a plurality of needles, a contactor including a pad in contact with the plurality of needles one-to-one, and a test body which provides a test signal to the probe card, receives a measurement sig...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | According to an embodiment of the present invention, a probe card test system includes a probe card with a plurality of needles, a contactor including a pad in contact with the plurality of needles one-to-one, and a test body which provides a test signal to the probe card, receives a measurement signal outputted through the contactor, from the probe card, and tests an electrical characteristic of the probe card from the measurement signal which is corrected by correcting the measurement signal based on a previously extracted compensation value. Accordingly, the present invention can quickly and accurately test the probe card.
본 기술의 일 실시예에 의한 프로브 카드 테스트 시스템은 복수의 니들이 구비된 프로브 카드, 복수의 니들에 일대일로 접촉되는 패드를 구비하는 컨택터 및 프로브 카드로 테스트 신호를 제공하고, 프로브 카드로부터 컨택터를 통해 출력되는 측정 신호를 수신하며, 기 추출된 보상값에 기초하여 측정 신호를 보정하여 보정된 측정 신호로부터 프로브 카드의 전기적 특성을 검사하는 테스트 바디를 포함하도록 구성될 수 있다. |
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