Batch reactor for composing BDEAS used for manufacturing semiconductor

As disclosed batch-type reactor for composing bis(diethylamino)silane (BDEAS) used for manufacturing a semiconductor comprises a reactor body, a cooling jacket, and a plurality of raw material inlet pipes, it is possible to minimize the occurrence of the bubbling phenomenon caused by the formation o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAM, BYOUNG EUN, SEO, JAE YONG, KIM, JOON HYUNG, LEE, KYEONG JU, YUN, SU HYONG, OH, CHAN WOO, PARK, SEONG KUK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY METALLURGY ORGANIC CHEMISTRY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!