method for manufacturing of electrodeposition rotating for manufacture of ultra thin film
The present invention relates to a method for manufacturing a rotary cathode drum for manufacturing an ultra-thin film, which precisely processes a surface of a cathode drum with an even intensity of illumination to increase a current applying rate of the surface and allows an even density of electr...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | The present invention relates to a method for manufacturing a rotary cathode drum for manufacturing an ultra-thin film, which precisely processes a surface of a cathode drum with an even intensity of illumination to increase a current applying rate of the surface and allows an even density of electric current to improve quality of a copper foil plate, which is electrodeposited, extracted and imprinted on the surface of the cathode drum. The method for manufacturing a rotary cathode drum for manufacturing an ultra-thin film comprises: a step of preparing each of an inner plate and an outer plate; a step of inserting a low melting point insertion material formed by a process alloy component into a space between the inner plate and the outer plate and applying a transition liquid phase diffusion bonding technique to join the inner plate with the outer plate; a step of forming the inner plate and the outer plate to have a cylindrical drum-shape for the outer plate to be an upper surface; a step of welding a joint portion between the inner plate and the outer plate to form a cylindrical drum; a step of forming a titanium skin layer on the entire surface of the cylindrical drum by performing a surface reforming process in a circumferential direction and a longitudinal direction by means of an overlaying lamination technique; a step of performing primary thermal treatment, a machine process and a polishing process to the cylindrical drum where the titanium skin layer is welded in a vacuum inert atmosphere; a step of performing an ultrasonic nano-reforming surface treatment to the machine-processed and polished titanium skin layer to remove any residual process stress generated in the machine process; and a step of performing a secondary thermal treatment to the cylindrical drum where the titanium skin layer is formed at an atmosphere with mixed gas.
본 발명은 음극 드럼의 표면을 균일한 조도로 정밀 가공하여 표면 통 전율이 높고 전류밀도를 균일하게 함으로써 음극 드럼 표면에 전착, 석출, 전사되는 동박판의 품질을 향상시키도록 한 극박 제조용 회전음극 드럼의 제조방법에 관한 것으로서, 내부판과 외피판을 각각 준비하는 단계; 상기 내부판과 외피판 사이에 공정합금 성분의 저융점 삽입재를 삽입하고 천이액상 확산접합 기법을 적용하여 상기 내부판과 외피판을 접합하는 단계; 상기 외피판이 상부면이 되도록 상기 내부판과 외피판을 원통드럼 형태로 성형하는 단계; 상기 내부판과 외피판의 이음매 부분을 용접하여 원통형 드럼을 형성하는 단계; 상기 원통형 드럼의 전체 표면에 원주 방향과 길이 방향으로 육성 적층 기법으로 표면 개질처리하여 티타늄 표피층을 형성하는 단계; 상기 티타늄 표피층이 용접된 원통형 드럼을 진공 불활성 분위기에서 1차 열처리하고 기계가공 및 연마하는 단계; 상기 기계가공 및 연마된 티타늄 표피층에 초음파 나노 개질 표면처리를 실시하여 상기 기계가공시 발생된 가공 잔류 응력을 제거하는 단계; 상기 티타늄 표피층이 형성된 원통형 드럼을 혼합가스 분위기에서 2차 열처리를 실시하는 단계를 포함하여 이루어진 것을 특징으로 한다. |
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