MEMBRANE TYPE RESONANT SENSOR
A membrane type resonant sensor is disclosed. According to an embodiment of the present invention, the membrane type resonant sensor may comprise: a substrate in which an opening portion is formed; a membrane of which an edge portion is fixated to an internal side surface of the opening portion to c...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | A membrane type resonant sensor is disclosed. According to an embodiment of the present invention, the membrane type resonant sensor may comprise: a substrate in which an opening portion is formed; a membrane of which an edge portion is fixated to an internal side surface of the opening portion to close the opening portion; a detection layer stacked on an upper portion of the membrane, and having a probe material for a target material flowing into an upper portion of the opening portion to be coupled to the probe material; a vibration generator vibrating the membrane and the detection layer; and a frequency measurement device measuring resonant frequency of the membrane and the detection layer which are changed as the target material is coupled to the probe material.
멤브레인형 공진 센서가 개시된다. 일실시예에 따른 멤브레인형 공진 센서는, 개구부가 형성되는 기판; 테두리부가 상기 개구부의 내측면에 고정되어 상기 개구부를 폐쇄하는 멤브레인; 상기 멤브레인의 상부에 적층되고, 탐침물질을 포함하여 상기 개구부의 상부로 유입되는 목표물질이 상기 탐침물질에 결합되는 검출층; 상기 멤브레인 및 상기 검출층을 진동시키는 진동발생장치; 및 상기 목표물질이 상기 탐침물질에 결합됨에 따라 변화되는 상기 멤브레인 및 상기 검출층의 공진주파수를 측정하는 주파수 측정장치를 포함할 수 있다. |
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