Method of detecting deposition status of device and system thereof

The present invention relates to a method for determining the deposition status of a device and a system thereof. More specifically, the present invention relates to the method and the system for determining the deposition status of the device, which can simply determine the deposition status by ima...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AN, KYOUNG JOON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!