ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD FOR THE SAME

The present invention relates to an electrostatic chuck equipped with a heater, and to a manufacturing method thereof. The electrostatic chuck equipped with a heater is capable of improving temperature uniformity while using a high-purity plate. The electrostatic chuck comprises: an electrode plate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE, SUNG KYU, KIM, WON IL, LEE, DOO NO, KIM, DONG HAE, KIM, SUNG HWAN, PARK, GUN JUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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