A COOLANT-JETTING APPARATUS

The present invention relates to a coolant-jetting apparatus used for a wire saw apparatus. More particularly, the present invention relates to a coolant-jetting apparatus which can uniformly inject a coolant to the entire region by using an opened structure, and can produce a high-quality wafer. An...

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Bibliographische Detailangaben
Hauptverfasser: HAHN, YOUNG SIK, LEE, YOUNG JUN, KIM, NAM KI, JEONG, JAE HUN, KIM, DONG JIN, LEE, SEUNG JOO, CHOI, HYO IL, JUNG, SEUNG GU
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a coolant-jetting apparatus used for a wire saw apparatus. More particularly, the present invention relates to a coolant-jetting apparatus which can uniformly inject a coolant to the entire region by using an opened structure, and can produce a high-quality wafer. An apparatus which injects a coolant to a cut wire, includes: a pipe which is is hollow, and has a constant length and injection holes; a main body which has a space part which stores the coolant discharged through the injection holes and discharges the coolant stored in the space part to the cut wire through an opened front part; and a filtering unit which crosses the space part and removes foreign substances and bubbles from the coolant.