A COOLANT-JETTING APPARATUS
The present invention relates to a coolant-jetting apparatus used for a wire saw apparatus. More particularly, the present invention relates to a coolant-jetting apparatus which can uniformly inject a coolant to the entire region by using an opened structure, and can produce a high-quality wafer. An...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | The present invention relates to a coolant-jetting apparatus used for a wire saw apparatus. More particularly, the present invention relates to a coolant-jetting apparatus which can uniformly inject a coolant to the entire region by using an opened structure, and can produce a high-quality wafer. An apparatus which injects a coolant to a cut wire, includes: a pipe which is is hollow, and has a constant length and injection holes; a main body which has a space part which stores the coolant discharged through the injection holes and discharges the coolant stored in the space part to the cut wire through an opened front part; and a filtering unit which crosses the space part and removes foreign substances and bubbles from the coolant. |
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