APPARATUS FOR ANALYZING SUBSTRATE CONTAMINATION AND METHOD THEREOF

A substrate contamination analyzing apparatus according to the present invention is a substrate contamination analyzing apparatus capable of transporting a sample solution which is scanned in an analyzed target substrate by using a scan nozzle from the scan nozzle to an analyzer through a flow path....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOO, DAE HWAN, PARK, SANG HYUN, PARK, JUN HO, JUN, PIL KWON, SUNG, YONG IK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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