APPARATUS FOR ANALYZING SUBSTRATE CONTAMINATION AND METHOD THEREOF

A substrate contamination analyzing apparatus according to the present invention is a substrate contamination analyzing apparatus capable of transporting a sample solution which is scanned in an analyzed target substrate by using a scan nozzle from the scan nozzle to an analyzer through a flow path. The substrate contamination analyzing apparatus comprises: a sample tube having a space in which the sample solution is loaded; a switching valve to be combined to the sample tube and have at least a load position in which the sample solution is loaded in the sample tube and an injection position capable of injecting the loaded sample solution to the analyzer; and a gas section before and behind the sample solution when the sample solution is loaded in the sample tube. The substrate contamination analyzing apparatus additionally includes a detection sensor to distinguish and detect the gas section and the sample solution by being installed in the sample tube. According to the present invention, accurate loading of the sample solution can be possible and loss of the sample solution can be prevented by sensing the sample solution to be arrived at the sample tube and loading the sample solution. Moreover, a lesser sample solution is used and the sample solution can be moved from the scan nozzle to the sample tube at high speed.