SUBSTRATE SUPPORTING APPARATUS

The present invention relates to a substrate supporting apparatus capable of supporting the lower side of a substate. A substrate supporting apparatus according to the present invention includes a fixing support part (100) fixed to a corresponding object; a moving support part (200) which is combine...

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Bibliographische Detailangaben
Hauptverfasser: KIM, IN SOO, JANG, HEE SUP
Format: Patent
Sprache:eng ; kor
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