SUBSTRATE SUPPORTING APPARATUS

The present invention relates to a substrate supporting apparatus capable of supporting the lower side of a substate. A substrate supporting apparatus according to the present invention includes a fixing support part (100) fixed to a corresponding object; a moving support part (200) which is combine...

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Bibliographische Detailangaben
Hauptverfasser: KIM, IN SOO, JANG, HEE SUP
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a substrate supporting apparatus capable of supporting the lower side of a substate. A substrate supporting apparatus according to the present invention includes a fixing support part (100) fixed to a corresponding object; a moving support part (200) which is combined with the fixing support part (100) and moves the upper side of the fixing support part (100) to touch and support the lower side of a substrate (1).